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1997•Journal of Crystal GrowthRequires access

Highly uniform and structures grown in a multiwafer vertical rotating susceptor MOVPE reactor

Xinrong Zhang, Ingrid Moerman, Christa Sys, Piet M. A. Demeester, J. A. Crawley, E. J. Thrush

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Key concepts: Susceptor, Metalorganic vapour phase epitaxy, Wafer, Epitaxy, Materials science, Gallium, Wavelength, Optoelectronics

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