2009•Unpublished venueRequires access

Limitations and Optimization of Low-coherence Interferometry for High Precision Microscopic Form Measurement

Peter Lehmann, Jan Niehues

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Key concepts: Interferometry, White light interferometry, Interference microscopy, Optics, Interference (communication), Coherence (philosophical gambling strategy), White light, Phase unwrapping

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Limitations and Optimization of Low-coherence Interferometry for High Precision Microscopic Form Measurement — Research Paper | ScholarLens