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Mems & Microsystems Desingn And Manufacture

Tai–Ran Hsu

Abstract

1 Overview of MEMS and Microsystems 2 Working Principles of Microsystems 3 Engineering Science for Microsystem Design and Fabrication 4 Engineering Mechanics for Microsystems Design 5 Thermofluid Engineering and Microsystem Design 6 Scaling Laws in Miniaturization 7 Materials for MEMS and Microsystems 8 Microsystem Fabrication Processes 9 Overview of Micromanufacturing 10 Microsystems Design 11 Microsystem Packaging Appendixes 1 Recommended Units for Thermophysical Quantities 2 Conversion of Units between SI and Imperial Systems

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Key concepts: Microsystem, Microelectromechanical systems, Miniaturization, Fabrication, Engineering, Mechanical engineering, Materials science, Nanotechnology