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2015•Microelectronics ReliabilityRequires access

Fabrication of advanced probes for atomic force microscopy using focused ion beam

О. А. Агеев, A S Kolomiytsev, Al V Bykov, V. A. Smirnov, I N Kots

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Key concepts: Nanolithography, Cantilever, Focused ion beam, Fabrication, Atomic force microscopy, Nanotechnology, Materials science, Ion beam

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