High Voltage Engineering : The Study of Character of Electron Drift Velocity in CF4 Molecular Gas by the Boltzmann Equation

This paper describes the information for quantitative simulation of weakly ionized plasma. In previous paper, we calculated the electron transport coefficients by using two-term approximation of Boltzmann equation. But there is difference between the result of the two-term approximation of the Boltzmann equation and experiments in pure CF $_4$ molecular gas and in CF $_4$ +Ar gas mixture. Therefore, In this paper, we calculated the electron drift velocity (W) in pure CF $_4$ molecular gas and CF $_4$ +Ar gas mixture (1 %, 5 %, 10 %) for range of E/N values from 0.17～300 Td at the temperature was 300 K and pressure was 1 Torr by multi-term approximation of the Boltzmann equation by Robson and Ness. The results of two-term and multi-term approximation of the Boltzmann equation have been compared with each other for a range of E/N.