1966•NASA STI Repository (National Aeronautics and Space Administration)Open access

Auxiliary titanium sublimation pump produces ultrahigh /10 to the minus 11 torr/ vacuum

R. A. Outlaw

Abstract

Sublimated titanium as a gettering agent in conjunction with a turbine-type pump provides a two-step procedure for obtaining an ultrahigh vacuum of 10 to the minus 11 torr. The pump alone evacuates the chamber to a pressure of 10 to the minus 9 torr. The residual gas is removed by the gettering agent at a pumping speed of 15 liters per second per square inch.

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Available abstract

Key concepts: Getter, Torr, Sublimation (psychology), Titanium, Vacuum pump, Purge, Materials science, Analytical Chemistry (journal)