Research on Kinematics of a Novel Micromanipulator with Flexure Hinge

A three degree of freed parallel micromanipulator is presented.The DOF of parallel manipulator is analyzed by the screw theory, the driven number is gotten. The kinematics solutions are analyzed using the vector theory, as a result, the velocity of a movable platform are derived. Based on Jacobian matrix, the forward and inverse kinematic singular configuration of the parallel micromanipulator is also studied. The results show that sensitivity parameters existed in Jacobian matrix affect the relation between the input and the output of the micromanipulator, the vector space method is simple and convenient in analyzing the singularity of parallel mechanisms. The simulation results verified that the robot has the tiny displace, and the kinematics parameters of the robot can be conveniently acquired, so the study provides theoretical bases for the robot control and performance improvement.