Preparation of Microcrystalline Silicon for Tandem Solar Cells

Over the years, ULVAC kept developing and studying plasma enhanced chemical vapor deposition (PECVD) technology time by time. And our system changed from small load-lock type equipment to horizontal inline type equipment and then to vertical type in-line PECVD for mass production scale in the ’90. Recent solar market growing changed the equipment business dramatically, and it created a new business model called “turnkey”. Today the market demands more high output power modules and lower manufacturing costs for thin-film silicon solar cells. Therefore we developed microcrystalline silicon depositing technology for amorphous silicon (a-Si) and microcrystalline silicon (uc-Si) double junction thin film solar cells in production level. We introduced more than 100W output power by 1.54m2 a-Si single junction thin film solar cells. And this new technology will increase 30% or more of output power with a reasonable cost.