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Auger and X-ray Photoelectron Spectroscopy

D. Briggs, M. P. Seah

Open publisher page 500 citations

Abstract

Perspective on the Analysis of Surfaces and Interfaces Instrumentation Spectral Interpretation Depth Profiling in AES and XPS Quantification of AES and XPS Applications of AES in Microelectronics AES in Metallurgy Applications of Electron Spectroscopy to Heterogeneous Catalysis Applications of XPS in Polymer Technology Uses of Auger Electron and Photoelectron Spectroscopies in Corrosion Science.

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What this paper is about

Perspective on the Analysis of Surfaces and Interfaces Instrumentation Spectral Interpretation Depth Profiling in AES and XPS Quantification of AES and XPS Applications of AES in Microelectronics AES in Metallurgy Applications of Electron Spectroscopy to Heterogeneous Catalysis Applications of XPS in Polymer Technology Uses of Auger Electron and Photoelectron Spectroscopies in Corrosion Science.

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OpenAlex reports 500 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Perspective on the Analysis of Surfaces and Interfaces Instrumentation Spectral Interpretation Depth Profiling in AES and XPS Quantification of AES and XPS Applications of AES in Microelectronics AES in Metallurgy Applications of Electron Spectroscopy to Heterogeneous Catalysis Applications of XPS in Polymer Technology Uses of Auger Electron and Photoelectron Spectroscopies in Corrosion Science.

Key concepts: X-ray photoelectron spectroscopy, Auger electron spectroscopy, Microelectronics, Auger, Analytical Chemistry (journal), Materials science, Electron spectroscopy, Nanotechnology

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