2003•Unpublished venueRequires access
Mechanical Gas Flow Sensors based on silicon micromachining
Niklas Svedin
Open publisher page 0 citations
Abstract
This record does not include an abstract. Use the full-text link above if available.
Niklas Svedin
Abstract
An abstract is not available in the OpenAlex record for this paper.
A significance statement is not available in the OpenAlex record.
A contribution statement is not available in the OpenAlex record.
Method details are not available in the OpenAlex metadata.
Findings are not separately available in the OpenAlex metadata.
Limitations are not available in the OpenAlex metadata.
Application details are not available in the OpenAlex metadata.
Key concepts: Surface micromachining, Flow (mathematics), Flow sensor, Silicon, Materials science, Mechanical engineering, Engineering, Optoelectronics