2023•Lecture notes in networks and systemsRequires access

Modification of the Gas Sensitive Properties of Nanocrystalline Silicon Carbide Films by the Electron Irradiation

А. А. Семенов, Іhor Biletskyi, Hanna Dulfan, S. Skorik, V.N. Boriskin

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Key concepts: Fluence, Nanocrystalline material, Irradiation, Materials science, Silicon carbide, Electron beam processing, Electron, Range (aeronautics)

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Modification of the Gas Sensitive Properties of Nanocrystalline Silicon Carbide Films by the Electron Irradiation — Research Paper | ScholarLens