Influence of Mixture Composition on Electrophysical Parameters and Emission Spectra of Trifluoromethane Plasma with Oxygen and Argon

Abstract The influence of the mixture composition on the electrophysical parameters and emission spectra of trifluoromethane plasma with oxygen and argon under direct-current glow discharge conditions has been analyzed. It has been established that the reduced electric field strength varies nonlinearly with an increase in the proportion of the second gas in the mixture. The reduced emission intensity of atomic fluorine is shown to pass through a maximum at an oxygen volume fraction of 0.5 in the mixture; in the mixture with argon, it increases and remains almost unchanged in the range of 0.2–0.8. In the mixture with oxygen, a sharp decrease in the reduced CF2 emission intensity is observed in the range of 0.2–0.5, whereas it practically does not change in the range of 0.2–0.5 in the mixture with argon.