2017•Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physicsRequires access
Femtosecond‐Laser Irradiation onto Sapphire Substrates in an N2 Ambient Atmosphere
Reina Miyagawa, Kenzo Goto, Osamu Eryu
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Abstract
The authors propose a new technique for forming periodic nitride structures on sapphire substrates. These fine structures were formed only by femtosecond-laser irradiation in N2 ambient. Higher count values of nitrogen ions (CN-) were detected by TOF-SIMS, which demonstrates that nitrogenrelated bonds were formed.