2022•Sensors and Actuators A PhysicalRequires access

Support compliance: A non-ignorable factor for cantilever sensors for MEMS application

Diao-Feng Li, Nan Li, Chunguang Bai, Zhiqiang Zhang, Jian Zhao

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Key concepts: Cantilever, Deflection (physics), Microelectromechanical systems, Structural engineering, Compliance (psychology), Materials science, Engineering, Nanotechnology

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Support compliance: A non-ignorable factor for cantilever sensors for MEMS application — Research Paper | ScholarLens