Determination of Transverse Amplitude of Microbeam Vibrating Accounting for Nonlinear Effects

The nonlinear dynamics of a microbeam with initial axial tension is presented. The nonlocal theory with a small scale effect is applied to the problem model. Considering the axial protraction due to the transverse deformation of the microbeam, a nonlinear partial differential equation that governs the dynamic motion is derived. Explicit solution of transverse amplitude is obtained by the method of multiscale analysis. Both nonlinear and nonlocal effects are found to play significant roles in the vibration behaviors of a microbeam. The results may be helpful for the application and design of various micro-electronic-mechanical devices, where a microbeam acts as a basic element.