2020•International Journal of Recent Technology and Engineering (IJRTE)Open access

Analysis of U shaped MEMS Micro cantilever using COMSOL

DST, Women scientist, K. Durga Aparna, N. Amarnath

Abstract

This paper explains about analysis of U shaped MEMS cantilever with silicon substrate using COMSOL Multiphysics software. This U shape cantilever structure is made of silicon and on that different layers are incorporated. U shape cantilever will have high beam length and this design can meet any requirements with allowable strain limits.

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Available abstract

Key concepts: Cantilever, Multiphysics, Microelectromechanical systems, Silicon, Substrate (aquarium), Materials science, Finite element method, Mechanical engineering