Coordinate Measuring Technology of Optical Aspheric Surface

The traditional mechanical coordinate measuring technology includes common coordinate measurement machines and all kinds of professional large-scale surface profilometer technology. Coordinate measuring can be divided into the following types according to different measurements, namely altitude difference measurement, gradient measurement, curvature measurement, and error separation. Environmental error is a significant factor affecting the measurement accuracy in any high precision measuring system. The basic principle of coordinate measuring is to transform 3D measurement into 2D measurement by measuring multiple meridian section lines to realize the 3D measurement. According to the influence of pose error, the pose error separation optimization is presented based on the model parameter estimation, and obtain the optimal estimation under the least square of pose error, eliminating its influence on measuring results and improving the measuring accuracy. Different from coordinate measuring, which is called linear profilometer, swing arm measuring is usually called nonlinear profilometer.