2014•Unpublished venueRequires access

ALD: Atomic Layer Deposition – Precise and Conformal Coating for Better Performance

Wei He

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Key concepts: Atomic layer deposition, Conformal coating, Chemical vapor deposition, Nanotechnology, Materials science, Deposition (geology), Coating, Thin film

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ALD: Atomic Layer Deposition – Precise and Conformal Coating for Better Performance — Research Paper | ScholarLens