1997•Computer Integrated Manufacturing SystemsRequires access

Apparatus and method for analyzing foreign matter on semiconductor wafers and for controlling the manufacturing process of semiconductor devices

Yasue Takao

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Key concepts: Process (computing), Radial basis function, Welding, Semiconductor device fabrication, Weighting, Wafer, Basis (linear algebra), Function (biology)

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Apparatus and method for analyzing foreign matter on semiconductor wafers and for controlling the manufacturing process of semiconductor devices — Research Paper | ScholarLens