LDMOS Drift Region With Field Oxides: Figure-of-Merit Derivation and Verification
Ali Saadat, Maarten L. Van de Put, Hal Edwards, William G. Vandenberghe
Abstract
Open-access reader
Ali Saadat, Maarten L. Van de Put, Hal Edwards, William G. Vandenberghe
Abstract
Open-access reader
We analytically and numerically investigate the performance of Laterally-Diffused Metal-Oxide-Semiconductor (LDMOS) transistors with Semi-circular Field OXide (S-FOX) focusing on mid-voltage (30 V – 100 V) power applications. We derive an analytical relation between breakdown voltage and on-resistance to realize the ideal behavior of the drift region for an LDMOS with S-FOX. Then, we find the optimized drift doping concentration minimizing the on-resistance at a given breakdown voltage. We introduce a new figure-of-merit for the drift region of a lateral device with S-FOX. We finally verify our ideal analytical findings with numerical results modeled and simulated in a commercial Technology Computer-Aided Design (TCAD).
OpenAlex reports 13 citations for this work. Citation counts describe recorded attention and do not establish research quality.
A contribution statement is not available in the OpenAlex record.
Method details are not available in the OpenAlex metadata.
Findings are not separately available in the OpenAlex metadata.
Limitations are not available in the OpenAlex metadata.
Application details are not available in the OpenAlex metadata.
We analytically and numerically investigate the performance of Laterally-Diffused Metal-Oxide-Semiconductor (LDMOS) transistors with Semi-circular Field OXide (S-FOX) focusing on mid-voltage (30 V – 100 V) power applications. We derive an analytical relation between breakdown voltage and on-resistance to realize the ideal behavior of the drift region for an LDMOS with S-FOX. Then, we find the optimized drift doping concentration minimizing the on-resistance at a given breakdown voltage. We introduce a new figure-of-merit for the drift region of a lateral device with S-FOX. We finally verify our ideal analytical findings with numerical results modeled and simulated in a commercial Technology Computer-Aided Design (TCAD).
Key concepts: LDMOS, Figure of merit, Breakdown voltage, Ideal (ethics), Voltage, Materials science, Transistor, Field (mathematics)