2021Journal of Nanoscience Nanoengineering and ApplicationsRequires access

Polymer Processing in Microfluidics towards the Fabrication of Nanofluidic Systems in Nanotechnology

Subhadeep Mukhopadhyay

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Abstract

This experimental work reports two individual SU-8 based glass microfluidic devices to be fabricated by maskless lithography along with indirect bonding technique using the steps of SU-8 processing. Dyed water is the selected and prepared working liquid for this work. The CMOS camera is used to record the passive microfluidic flow of dyed water in fabricated devices. In future, this report may be suitable to investigate the nanofluidic flow phenomena in nanofluidics using proper fabrication techniques with appropriate recording systems.

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What this paper is about

This experimental work reports two individual SU-8 based glass microfluidic devices to be fabricated by maskless lithography along with indirect bonding technique using the steps of SU-8 processing. Dyed water is the selected and prepared working liquid for this work. The CMOS camera is used to record the passive microfluidic flow of dyed water in fabricated devices. In future, this report may be suitable to investigate the nanofluidic flow phenomena in nanofluidics using proper fabrication techniques with appropriate recording systems.

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Available abstract

This experimental work reports two individual SU-8 based glass microfluidic devices to be fabricated by maskless lithography along with indirect bonding technique using the steps of SU-8 processing. Dyed water is the selected and prepared working liquid for this work. The CMOS camera is used to record the passive microfluidic flow of dyed water in fabricated devices. In future, this report may be suitable to investigate the nanofluidic flow phenomena in nanofluidics using proper fabrication techniques with appropriate recording systems.

Key concepts: Microfluidics, Nanofluidics, Fabrication, Nanotechnology, Materials science, Lithography, Soft lithography, Polymer

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