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2021•Plasma Physics ReportsRequires access

On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

T. D. Akhmetov, А. А. Иванов, Igor V. Shikhovtsev

Open publisher page 3 citations

Abstract

Abstract In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

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What this paper is about

Abstract In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

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Available abstract

Abstract In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

Key concepts: Faraday cage, Plasma, Electric field, Physics, Vortex, Generator (circuit theory), Radio frequency, Shield

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