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Real-time in-situ chemical sensing in aluminum gallium nitride/gallium nitride metal-organic chemical vapor deposition processes for advanced process control

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Key concepts: Chemical vapor deposition, Gallium nitride, Gallium, Nitride, Materials science, Aluminium, Deposition (geology), Process (computing)

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Real-time in-situ chemical sensing in aluminum gallium nitride/gallium nitride metal-organic chemical vapor deposition processes for advanced process control — Research Paper | ScholarLens