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1986•Physical Review LettersOpen access

Atomic Force Microscope

Gerd K. Binnig, C. F. Quate, Ch. Gerber

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Abstract

The scanning tunneling microscope is proposed as a method to measure forces as small as ${10}^{\ensuremath{-}18}$ N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 \AA{}A and a vertical resolution less than 1 \AA{}.

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What this paper is about

The scanning tunneling microscope is proposed as a method to measure forces as small as ${10}^{\ensuremath{-}18}$ N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 \AA{}A and a vertical resolution less than 1 \AA{}.

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Available abstract

The scanning tunneling microscope is proposed as a method to measure forces as small as ${10}^{\ensuremath{-}18}$ N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 \AA{}A and a vertical resolution less than 1 \AA{}.

Key concepts: Stylus, Microscope, Profilometer, Scanning tunneling microscope, Scanning probe microscopy, Scanning Hall probe microscope, Materials science, Magnetic force microscope

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