Effects of Annealing Temperature on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition
Zhuang, Huizhao Huizhao, Xue, Shoubin Shoubin, Chengshan, Hu, Lijun, Li, Baoli, Zhang, Shiying
Abstract
Zhuang, Huizhao Huizhao, Xue, Shoubin Shoubin, Chengshan, Hu, Lijun, Li, Baoli, Zhang, Shiying
Abstract
ZnO 薄膜在 n-Si (111 ) 上被扔由搏动的激光免职(PLD ) 的底层系统。然后,样品在周围的空中在不同温度被退火,他们的性质特别地作为退火的功能被调查温度。Themicrostructure,形态学和成长得当的 ZnO 电影的光性质被学习由 X-raydiffraction (XRD ) ,原子力量显微镜(AFM ) , Fourier 红外线分光镜(FTIR ) 和光致发光(PL ) 系列。结果证明成长得当的 ZnO 电影与比较喜欢的 c 轴取向有 hexagonalwurtzite 结构。而且, ZnOcrystallites 的直径变得更大, ZnO 电影的水晶质量随退火的增加被改进温度。
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ZnO 薄膜在 n-Si (111 ) 上被扔由搏动的激光免职(PLD ) 的底层系统。然后,样品在周围的空中在不同温度被退火,他们的性质特别地作为退火的功能被调查温度。Themicrostructure,形态学和成长得当的 ZnO 电影的光性质被学习由 X-raydiffraction (XRD ) ,原子力量显微镜(AFM ) , Fourier 红外线分光镜(FTIR ) 和光致发光(PL ) 系列。结果证明成长得当的 ZnO 电影与比较喜欢的 c 轴取向有 hexagonalwurtzite 结构。而且, ZnOcrystallites 的直径变得更大, ZnO 电影的水晶质量随退火的增加被改进温度。
Key concepts: Pulsed laser deposition, Annealing (glass), Materials science, Fourier transform infrared spectroscopy, Thin film, Deposition (geology), Atomic force microscopy, Analytical Chemistry (journal)