2010•Electrical Overstress/Electrostatic Discharge SymposiumRequires access

Analysis of dynamic effects of charge injection due to ESD in MEMS

Greason

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Key concepts: Electrostatic discharge, Microelectromechanical systems, Charge (physics), Materials science, Electronic engineering, Optoelectronics, Electrical engineering, Physics

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Analysis of dynamic effects of charge injection due to ESD in MEMS — Research Paper | ScholarLens