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2009•Acta Scientiarum Naturalium Universitatis SunyatseniRequires access

Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering

Jong-Kook, Lee Lee, Gwon-Seung, Yang

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Abstract

切工具上的基于钛的氮化物涂层，出版社塑造并且死因为他们的优异腐蚀和氧化电阻，能被用来延长他们的生命周期。TiAlN/ZrN 和 TiCrN/ZrN 多层的涂层被 RF 磁控管在热处理期间劈啪作响，和他们的微结构进化和腐蚀电阻准备被调查。TiAlN/ZrN 和 TiCrN/ZrN 多层的涂层被加热直到 600 降级 ? 慣汬摥琠? 桴 ? 慢？

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What this paper is about

切工具上的基于钛的氮化物涂层，出版社塑造并且死因为他们的优异腐蚀和氧化电阻，能被用来延长他们的生命周期。TiAlN/ZrN 和 TiCrN/ZrN 多层的涂层被 RF 磁控管在热处理期间劈啪作响，和他们的微结构进化和腐蚀电阻准备被调查。TiAlN/ZrN 和 TiCrN/ZrN 多层的涂层被加热直到 600 降级 ? 慣汬摥琠? 桴 ? 慢？

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Available abstract

切工具上的基于钛的氮化物涂层，出版社塑造并且死因为他们的优异腐蚀和氧化电阻，能被用来延长他们的生命周期。TiAlN/ZrN 和 TiCrN/ZrN 多层的涂层被 RF 磁控管在热处理期间劈啪作响，和他们的微结构进化和腐蚀电阻准备被调查。TiAlN/ZrN 和 TiCrN/ZrN 多层的涂层被加热直到 600 降级 ? 慣汬摥琠? 桴 ? 慢？

Key concepts: Materials science, Metallurgy, Sputtering, Cavity magnetron, Sputter deposition, Zirconium nitride, Composite material, Nanotechnology

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