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2021•VacuumRequires access

Extraction and transport of low-energy Ar ion beams with a broad cross-section

Magdaleno R. Vasquez, Mark D. Ilasin, Lance Tristan Oliver R. Pengson, Mc Guillis Kim F. Ramos, Andrea Gracia T. Cuevas

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Key concepts: Faraday cup, Ion beam deposition, Ion, Ion gun, Ion source, Ion beam, Argon, Atomic physics

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