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2020•Journal of Physics Conference SeriesOpen access

Research of a micromechanical accelerometer with three sensitivity axes

Лысенко Игорь Евгеньевич, Olga A. Ezhova, Alexey V. Tkachenko, Д В Науменко

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Abstract

Abstract Micromechanical linear acceleration sensors are widely used in modern inertial orientation and navigation systems of technical equipment used in industry. The paper presents the developed design of MEMS linear acceleration sensor with three sensitivity axes, modal and static analysis is performed, design parameters are found that ensure equality of natural frequencies along the sensitivity axes, and experimental samples are created and studied.

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What this paper is about

Abstract Micromechanical linear acceleration sensors are widely used in modern inertial orientation and navigation systems of technical equipment used in industry. The paper presents the developed design of MEMS linear acceleration sensor with three sensitivity axes, modal and static analysis is performed, design parameters are found that ensure equality of natural frequencies along the sensitivity axes, and experimental samples are created and studied.

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Available abstract

Abstract Micromechanical linear acceleration sensors are widely used in modern inertial orientation and navigation systems of technical equipment used in industry. The paper presents the developed design of MEMS linear acceleration sensor with three sensitivity axes, modal and static analysis is performed, design parameters are found that ensure equality of natural frequencies along the sensitivity axes, and experimental samples are created and studied.

Key concepts: Accelerometer, Sensitivity (control systems), Acceleration, Linear acceleration, Microelectromechanical systems, Inertial measurement unit, Orientation (vector space), Modal

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