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Epitaxial Oxide Thin Films Grown by Solid Source Metal-Organic Chemical Vapor Deposition.

Zihong Lü

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Key concepts: Chemical vapor deposition, Combustion chemical vapor deposition, Epitaxy, Materials science, Thin film, Oxide, Metalorganic vapour phase epitaxy, Metal

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Epitaxial Oxide Thin Films Grown by Solid Source Metal-Organic Chemical Vapor Deposition. — Research Paper | ScholarLens