SiON waveguide and polymer waveguide for optical interconnects of silicon photonics

Silicon photonics provide many advantages to telecom, datacom, and high performance computer systems such as increase transmission distance, high data bandwidth and reduce energy consumption. In this paper, we present SiON taper waveguide (SiON-WG) as a mode converter between silicon waveguide (Si-WG) and polymer waveguide (P-WG) to keep coupling efficiency of ± 3 μm misalignment. The propagation loss of polymer waveguide is 0.72 dB/cm at 1310 nm using cut-back method on a straight waveguide. The process of polymer waveguide on silicon photonic (SiPh) chip and flip chip bonding of polymer waveguide chip to silicon photonic chip are developed. Bonding gap between SiON waveguide and polymer waveguide is improved to obtain high coupling efficiency.