2007Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIEOpen access

Surface acoustic wave devices

Christian D. Muller, A. A. Nateprov, G. Obermeier, Matthias Klemm, V. Tsurkan, A. Wixforth, R. Tidecks, S. Horn

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Abstract

Starting with an introduction to surface acoustic waves, their generation and detection using interdigital transducers (IDTs) on piezoelectric materials (e.g.LiNbOj and ZnO) will be reviewed.Then the application of surface acoustic waves in electronic devices will be presented.Moreover, recent studies, using the technique of attaching the material of investigation onto the sound path of the acoustic delay line between the IDTs is discussed.

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What this paper is about

Starting with an introduction to surface acoustic waves, their generation and detection using interdigital transducers (IDTs) on piezoelectric materials (e.g.LiNbOj and ZnO) will be reviewed.Then the application of surface acoustic waves in electronic devices will be presented.Moreover, recent studies, using the technique of attaching the material of investigation onto the sound path of the acoustic delay line between the IDTs is discussed.

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Available abstract

Starting with an introduction to surface acoustic waves, their generation and detection using interdigital transducers (IDTs) on piezoelectric materials (e.g.LiNbOj and ZnO) will be reviewed.Then the application of surface acoustic waves in electronic devices will be presented.Moreover, recent studies, using the technique of attaching the material of investigation onto the sound path of the acoustic delay line between the IDTs is discussed.

Key concepts: Surface acoustic wave, Acoustics, Acoustic wave, Transducer, Surface acoustic wave sensor, Interdigital transducer, Piezoelectricity, Materials science

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