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Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale

Ladislav Straka, Ladislav Klimša, Jaromı́r Kopeček, Denys Musiienko, K. Ullakko, Oleg Heczko

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Abstract

Preprint of the article: L. Straka, L. Klimša, J. Kopeček, D. Musiienko, K. Ullakko, O. Heczko, Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale, Actuator 18, Conference proceedings, ISBN 978-3-933339-30-0 MESSE BREMEN (2018) 583. Presented at 16th International Conference on New Actuators 25 – 27 June 2018 Bremen, Germany www.actuator.de Preprint made available with the kind permission of the publisher.

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What this paper is about

Preprint of the article: L. Straka, L. Klimša, J. Kopeček, D. Musiienko, K. Ullakko, O. Heczko, Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale, Actuator 18, Conference proceedings, ISBN 978-3-933339-30-0 MESSE BREMEN (2018) 583. Presented at 16th International Conference on New Actuators 25 – 27 June 2018 Bremen, Germany www.actuator.de Preprint made available with the kind permission of the publisher.

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Available abstract

Preprint of the article: L. Straka, L. Klimša, J. Kopeček, D. Musiienko, K. Ullakko, O. Heczko, Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale, Actuator 18, Conference proceedings, ISBN 978-3-933339-30-0 MESSE BREMEN (2018) 583. Presented at 16th International Conference on New Actuators 25 – 27 June 2018 Bremen, Germany www.actuator.de Preprint made available with the kind permission of the publisher.

Key concepts: Focused ion beam, Microscale chemistry, Materials science, Polishing, Ion milling machine, Microfabrication, Ion, Martensite

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