Electrostatic diaphragm micropump electro-fluid-mechanical simulation

In this work, a fully-silicon mechanical displacement micropump is proposed and investigated. Electrostatic actuation of a flexible diaphragm is used to generate the pressure difference required to transport the fluid at the microscale. The study is carried out by exploiting the Finite Element method in a multiphysics framework, considering simplified geometries and boundary conditions. These investigations suggest the possibility to adopt the proposed device for applications in biomedical and biological fields. Achievable stroke volumes and flow rates are computed: values are in line with those obtained for similar devices presented in the literature.