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Characterization of Thin SiO 2 on Si by Neutron Reflectivity, X-ray Reflectivity, and Spectroscopic Ellipsometry

Joseph A. Dura, C. F. Majkrzak, Curt A. Richter, N. V. Nguyen

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Key concepts: X-ray reflectivity, Reflectivity, Characterization (materials science), Materials science, Ellipsometry, Neutron, Optics, Silicon

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Characterization of Thin SiO 2 on Si by Neutron Reflectivity, X-ray Reflectivity, and Spectroscopic Ellipsometry — Research Paper | ScholarLens