1993•Proceedings annual meeting Electron Microscopy Society of AmericaRequires access
Comparison of high-angle take-off and low-angle take-off EDX detector geometry of the HF-2000 FE-TEM
Yoshihiro Sato, T. Hashimoto, Masayoshi ICHIHASHI, Yuko Ueki, K. Hirose, T. Kamino
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Abstract
Analytical TEMs have two variations in x-ray detector geometry, high and low angle take off. The high take off angle is advantageous for accuracy of quantitative analysis, because the x rays are less absorbed when they go through the sample. The low take off angle geometry enables better sensitivity because of larger detector solid angle. Hitachi HF-2000 cold field emission TEM has two versions; high angle take off and low angle take off. The former allows an energy dispersive x-ray detector above the objective lens. The latter allows the detector beside the objective lens. The x-ray take off angle is 68° for the high take off angle with the specimen held at right angles to the beam, and 22° for the low angle take off. The solid angle is 0.037 sr for the high angle take off, and 0.12 sr for the low angle take off, using a 30 mm2detector.