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Optical properties of Er-doped silicon rich silicon oxide(SRSO) films deposited by electron cyclotron resonance-plasma enhanced chemical vapor deposition(ECR-PECVD) = ECR PECVD 방법으로 증착한 Er 이 도핑된 SRSO 박막에서의 광학적 특성연구

Se-Young Seo, 서세영

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Key concepts: Plasma-enhanced chemical vapor deposition, Electron cyclotron resonance, Chemical vapor deposition, Silicon oxide, Silicon, Materials science, Doping, Plasma

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Optical properties of Er-doped silicon rich silicon oxide(SRSO) films deposited by electron cyclotron resonance-plasma enhanced chemical vapor deposition(ECR-PECVD) = ECR PECVD 방법으로 증착한 Er 이 도핑된 SRSO 박막에서의 광학적 특성연구 — Research Paper | ScholarLens