ScholarLens Back to search
2019•Unpublished venueRequires access

Designing and Analyzing on Thermoelectric Cooler for Turbomolecular Pump Cooling Applications

Athorn Vora–ud, Wassana Kasemsin, Tosawat Seetawan, Somporn Thaowankaew, Damrat Weatchapitak

Open publisher page 1 citations

Abstract

Rotor temperature of turbomolecular pump (TMP) requests less than 120 °C due to the heat may be prone to deposit reaction products. For example, TMP of ULVAC products use water cooling from the chiller for controlling heat generated in the rotor. We designed and made the controller of thermoelectric cooler (TEC) for cooling of TMP without the water cooling from the chiller. The TEC for TMP cooling was designed and analyzed by Finite element method to study the generated heat and transfer phenomena of the waste heat to another section of the apparatus. The controller applied the control though Arduino board into a switching system to be driven DC current to TEC for 6 modules. The result showed that the TEC could be controlled for TMP cooling in the temperature range of 15-25 °C and the waste heat released to environment less than 40 °C, approximately.

About this research paper

What this paper is about

Rotor temperature of turbomolecular pump (TMP) requests less than 120 °C due to the heat may be prone to deposit reaction products. For example, TMP of ULVAC products use water cooling from the chiller for controlling heat generated in the rotor. We designed and made the controller of thermoelectric cooler (TEC) for cooling of TMP without the water cooling from the chiller. The TEC for TMP cooling was designed and analyzed by Finite element method to study the generated heat and transfer phenomena of the waste heat to another section of the apparatus. The controller applied the control though Arduino board into a switching system to be driven DC current to TEC for 6 modules. The result showed that the TEC could be controlled for TMP cooling in the temperature range of 15-25 °C and the waste heat released to environment less than 40 °C, approximately.

Why it matters

OpenAlex reports 1 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Rotor temperature of turbomolecular pump (TMP) requests less than 120 °C due to the heat may be prone to deposit reaction products. For example, TMP of ULVAC products use water cooling from the chiller for controlling heat generated in the rotor. We designed and made the controller of thermoelectric cooler (TEC) for cooling of TMP without the water cooling from the chiller. The TEC for TMP cooling was designed and analyzed by Finite element method to study the generated heat and transfer phenomena of the waste heat to another section of the apparatus. The controller applied the control though Arduino board into a switching system to be driven DC current to TEC for 6 modules. The result showed that the TEC could be controlled for TMP cooling in the temperature range of 15-25 °C and the waste heat released to environment less than 40 °C, approximately.

Key concepts: Thermoelectric cooling, TEC, Chiller, Water cooling, Active cooling, Nuclear engineering, Waste heat, Thermoelectric effect

Related papers

Related paper 1Related paper 2Related paper 3
Back to paper searchBrowse research topicsOriginal source
Designing and Analyzing on Thermoelectric Cooler for Turbomolecular Pump Cooling Applications — Research Paper | ScholarLens