2003•Defense Technical Information Center (DTIC)Requires access

Optical Diagnostics of Atmospheric Pressure Glow Discharge in Nitrogen with Admixture of Organosilicon

Zdeněk Navrátil, Pavel Šťahel, David Trunec, Vilma Buršı́ková

Abstract

The atmospheric pressure glow discharge in nitrogen with small admixture of different organosilicon, is compounds such as hexamethyldisilazane and hexamethyldisiloxane studied by means of emission spectroscopy. The deposited films were studied by means of indentation techniques.

About this research paper

What this paper is about

Why it matters

A significance statement is not available in the OpenAlex record.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Key concepts: Organosilicon, Hexamethyldisiloxane, Glow discharge, Atmospheric pressure, Nitrogen, Analytical Chemistry (journal), Materials science, Chemistry