2019•Journal of the Atomic Energy Society of JapanOpen access

Material characterization using scanning transmission electron microscopy and electron energy-loss spectroscopy

Koji Kimoto

Abstract

走査透過電子顕微鏡(Scanning Transmission Electron Microscopy; STEM)と電子エネルギー損失分光法(Electron Energy-Loss Spectroscopy; EELS)を組み合わせることにより，局所領域で結晶構造解析や元素分析が可能になる。STEMでは環状暗視野像や環状明視野像を用いて，結晶構造を直接観察できる。単原子を可視化する感度を持ち，収差補正装置などを用いれば空間分解能は50pm以下に達する。EELSでは内殻励起スペクトルを利用して，元素毎に原子列を可視化することができる。本稿では計測法の概要と最近の装置の進歩，およびいくつかの観察例を示す。

Open-access reader

About this research paper

What this paper is about

Why it matters

A significance statement is not available in the OpenAlex record.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Key concepts: Energy filtered transmission electron microscopy, Characterization (materials science), Scanning transmission electron microscopy, Electron energy loss spectroscopy, Scanning confocal electron microscopy, Polymer characterization, Materials science, Electron tomography