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2018•Unpublished venueRequires access

SOFT LITHOGRAPHY COMPATIBLE FABRICATION OF PARALLEL ELECTRODES IN MICROFLUIDIC DEVICES

Ruxiu Liu, Chia‐Heng Chu, Mert Boya, Ozgun Civelekoglu, Hang Chen, A. Fatih Sarioglu

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Key concepts: Microfluidics, Fabrication, Lithography, Nanotechnology, Soft lithography, Electrode, Materials science, Photolithography

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SOFT LITHOGRAPHY COMPATIBLE FABRICATION OF PARALLEL ELECTRODES IN MICROFLUIDIC DEVICES — Research Paper | ScholarLens