Shinsuke KISHIKAWA, Yuzo Hayashi
Abstract
When residual gas analysis in the UHV and XHV regions are performed with a general quadrupole mass spectrometer (QMS), it is difficult to perform accurate gas analysis due to outgassing from the sensor ion source. We have developed an ultra-low outgassing QMS with an improved ion source to enable highly accurate residual gas analysis.
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When residual gas analysis in the UHV and XHV regions are performed with a general quadrupole mass spectrometer (QMS), it is difficult to perform accurate gas analysis due to outgassing from the sensor ion source. We have developed an ultra-low outgassing QMS with an improved ion source to enable highly accurate residual gas analysis.
Key concepts: Outgassing, Residual gas analyzer, Quadrupole mass analyzer, Mass spectrometry, Residual, Hybrid mass spectrometer, Gas analysis, Quadrupole