Highly Manufacturable Nanoporous Ag Films Using New Sputtering System for Surface Enhanced Raman Scattering Substrate

We have developed and characterized a highly manufacturable nanoporous Ag film using a custom-made sputtering system for a surface enhanced Raman scattering substrate for biosensors. The Raman response property of the Ag nanoporous thin film peaked at the same characteristic wavelength as a commercial specimen with an intensity that was 1.5 times higher. We also observed the characteristics of the Ag nanoporous films prepared in this study up to 10 picomole of Rhodamine 6G concentration and 1 picomole and 0.1 picomole using additional signal processing methods. The Raman intensity was at least 10 times higher than the intensity of the Ag nanoporous thin film itself, at densities of 4.3 × 10⁴ cps, 4.0 × 10⁴ cps, 2.9 × 10⁴ cps, and 1.4 × 10⁴ cps. The characteristic peak wavelength also differed. The Raman intensity peak was highest at a wave number of 1513/cm, regardless of the thickness of the Ag nanoporous film, and was found to have a large peak, in the order of 1364/cm, 1314/cm, 612/cm, and 1653/cm. Therefore, it can be confirmed that the Ag nanoporous thin film proposed in this paper can be used as a SERS substrate.