Application of Synchrotron Radiation Excited X-Ray Fluorescence Analysis to Micro and Trace Element Determination

Abstract Micro and trace element analysis by X-ray fluorescence was carried out using synchrotron radiation from a bending magnet and an undulator for hard and soft X-ray excitation respectively. The minimum detection limits obtained in the hard X-ray region were less than pg, which corresponds to a spatial resolution of less than a hundred micronmeters, with a detection limit of a few ppm. Light elements such as oxygen, nitrogen and carbon in silicon compounds were analyzed by soft X-ray emission spectroscopy using undulator radiation. The minimum detectable amount of the light elements was greatly improved, since undulator radiation is very strong in intensity, and is highly collimated.