P‐6.13: Review of Device Defect Related to Environment Contamination in FPD Manufacturing

Based on accumulated more than 15 years of cooperation experience with FPD manufacturers on device defect and chemical contamination from environment, a summarized review of device defect related to environment contamination is prepared in this paper. The fact that major contamination source comes from product process itself, that is the so called cross contamination, could be summarized concluded. The experience indicates that a tradeoff between throughput and contamination control during process layout planning would be helpful for future defect defense and control.