2018•Microelectronics ReliabilityOpen access

Photon emission as a characterization tool for bipolar parasitics in FinFET technology

A. Beyreuther, Norbert Herfurth, Elham Amini, Tomonori Nakamura, Ingrid De Wolf, Christian Boit

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Key concepts: Parasitic extraction, Bipolar junction transistor, Characterization (materials science), Optoelectronics, Electronic engineering, Silicon-germanium, Materials science, Transistor