2018•IOP Conference Series Materials Science and EngineeringOpen access

Properties of TiN/CrN superlattice hard coatings deposited by reactive magnetron sputtering

Милко Ангелов, T. Cholakova, Lilyana Kolaklieva, Roumen Kakanakov, Vasiliy Chitanov

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Abstract

Nanostructured TiN/CrN superlattice hard coatings were deposited using a reactive closed field unbalanced magnetron sputtering in the presence of additional anode for higher plasma ionisation degree at temperatures lower than 240°C. Coatings with three different bilayer periods (Λ) of 16 nm, 20 nm and 24 nm with applying a moderate substrate bias were obtained. The effect of bilayer period on the mechanical and tribological properties of the coatings was investigated by atomic force microscopy, nanoindentation, micro scratch and ball–on–disk wear tests. All the coatings possessed enhanced hardness, decreased coefficient of friction, improved adhesion and higher toughness in comparison with single-layer and gradient-composition hard coatings. The highest hardness value of about 30 GPa and elastic modulus of 360 GPa were measured for the coating with bilayer thickness of 24 nm. The friction coefficient against the diamond tip was within the range 0.2 for Λ = 20 nm to 0,208 for Λ = 16 nm. The calculated wear rates against 3/16 inch alumina ball were within the range from 1,045.10 −6 mm 3 /N.m for Λ = 24 nm to 1,955.10 −6 mm 3 /N.m for Λ = 16 nm. The static coefficient of friction μ SS against polished SS plate was μ SS = 0,268 for Λ = 24 nm, up to μ SS = 0,301 for Λ = 16 nm, as the reference TiN layer possesses μ SS = 0,218. The wetting angle of the coatings against deionised water was between 91° for Λ = 16 nm to 85° for Λ = 24 nm.

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Nanostructured TiN/CrN superlattice hard coatings were deposited using a reactive closed field unbalanced magnetron sputtering in the presence of additional anode for higher plasma ionisation degree at temperatures lower than 240°C. Coatings with three different bilayer periods (Λ) of 16 nm, 20 nm and 24 nm with applying a moderate substrate bias were obtained. The effect of bilayer period on the mechanical and tribological properties of the coatings was investigated by atomic force microscopy, nanoindentation, micro scratch and ball–on–disk wear tests. All the coatings possessed enhanced hardness, decreased coefficient of friction, improved adhesion and higher toughness in comparison with single-layer and gradient-composition hard coatings. The highest hardness value of about 30 GPa and elastic modulus of 360 GPa were measured for the coating with bilayer thickness of 24 nm. The friction coefficient against the diamond tip was within the range 0.2 for Λ = 20 nm to 0,208 for Λ = 16 nm. The calculated wear rates against 3/16 inch alumina ball were within the range from 1,045.10 −6 mm 3 /N.m for Λ = 24 nm to 1,955.10 −6 mm 3 /N.m for Λ = 16 nm. The static coefficient of friction μ SS against polished SS plate was μ SS = 0,268 for Λ = 24 nm, up to μ SS = 0,301 for Λ = 16 nm, as the reference TiN layer possesses μ SS = 0,218. The wetting angle of the coatings against deionised water was between 91° for Λ = 16 nm to 85° for Λ = 24 nm.

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Available abstract

Nanostructured TiN/CrN superlattice hard coatings were deposited using a reactive closed field unbalanced magnetron sputtering in the presence of additional anode for higher plasma ionisation degree at temperatures lower than 240°C. Coatings with three different bilayer periods (Λ) of 16 nm, 20 nm and 24 nm with applying a moderate substrate bias were obtained. The effect of bilayer period on the mechanical and tribological properties of the coatings was investigated by atomic force microscopy, nanoindentation, micro scratch and ball–on–disk wear tests. All the coatings possessed enhanced hardness, decreased coefficient of friction, improved adhesion and higher toughness in comparison with single-layer and gradient-composition hard coatings. The highest hardness value of about 30 GPa and elastic modulus of 360 GPa were measured for the coating with bilayer thickness of 24 nm. The friction coefficient against the diamond tip was within the range 0.2 for Λ = 20 nm to 0,208 for Λ = 16 nm. The calculated wear rates against 3/16 inch alumina ball were within the range from 1,045.10 −6 mm 3 /N.m for Λ = 24 nm to 1,955.10 −6 mm 3 /N.m for Λ = 16 nm. The static coefficient of friction μ SS against polished SS plate was μ SS = 0,268 for Λ = 24 nm, up to μ SS = 0,301 for Λ = 16 nm, as the reference TiN layer possesses μ SS = 0,218. The wetting angle of the coatings against deionised water was between 91° for Λ = 16 nm to 85° for Λ = 24 nm.

Key concepts: Materials science, Nanoindentation, Tin, Composite material, Sputter deposition, Sputtering, Coating, Bilayer

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