2017•The Japan Society of Applied PhysicsRequires access

Analysis of the Reaction Process in the Vapor Phase and on the Substrate during GaN MOVPE

Kazuki Sekiguchi, Hiroki Shirakawa, Kenta Chokawa, Masaaki Araidai, Yoshihiro Kangawa, Koichi Kakimoto, Kenji Shiraishi

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Key concepts: Metalorganic vapour phase epitaxy, Materials science, Vapor phase, Substrate (aquarium), Process (computing), Phase (matter), Optoelectronics, Nanotechnology

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Analysis of the Reaction Process in the Vapor Phase and on the Substrate during GaN MOVPE — Research Paper | ScholarLens