2018•Fourth Seminar on Novel Optoelectronic Detection Technology and ApplicationRequires access
Fabrication of the blazed grating for near-infrared spectroscopy
Quan Liu, Jianhong Wu, Peiliang Guo, Feng Zhou
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Abstract
In this paper the diffraction characteristics of the blazed grating is investigated by using rigorous coupled-wave analysis, which indicates that within the near infrared broadband, the first-order diffraction efficiency can be over 10% at 1.2μm and over 65% at 2.3μm through controlling the blaze angle of the blazed grating. The blazed grating with the period of 8.33μm, the blaze angle about 7.3 degree, and the antiblaze angle about 41.8 degree has been fabricated by holographic lithography - ion beam etching. Theoretical analysis has showed that the diffraction efficiency of these blazed grating can reach 15% at 1.2μm, 73% at 2.3μm and 75% at blazed wavelength.