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Trichlorosilane의 수소환원에 의한 고순도 규소 제조에 대한 연구 = The preparation of high-purity silicon by hydrogen reduction of trichlorosilane

이종화, Jong-Hwa Lee

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Key concepts: Trichlorosilane, Reduction (mathematics), Silicon, Materials science, Optoelectronics, Mathematics, Geometry

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Trichlorosilane의 수소환원에 의한 고순도 규소 제조에 대한 연구 = The preparation of high-purity silicon by hydrogen reduction of trichlorosilane — Research Paper | ScholarLens